MEMS actuator array as a neuro-physiological testing tool Conference Paper
| Authors: | Enikov, E. T.; Lazarov, K. V.; Gonzales, G. R. |
| Title: | MEMS actuator array as a neuro-physiological testing tool |
| Conference Title: | 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology |
| Abstract: | Tactile perception of complex symbols through tactile stimulation is an exciting application of a phenomenon known as tactile illusion (TI). Sensation of motion on the skin can be produced by a limited number of discrete mechanical actuators applying light pressure over the skin. This phenomenon can thus be used as a neurophysiological testing tool to determine central and peripheral nervous system injury as well as providing an additional human-machine communication channel. This paper describes the development of a 4 x 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array is approximately one square centimeter and utilizes novel micro-clutch MEMS technology. The individual pixels are turned ON and OFF by pairs of microscopic thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. The physiological parameters required for inducing tactile illusion are described. The fabrication sequence for the thermal microactuators along with actuation results are also presented. |
| Keywords: | illusion; thermal actuators; tactile array; su8; piezo-actuators; tactile illusion |
| Journal Title | Proceedings of the 2nd Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine & Biology |
| Conference Dates: | 2002 May 2-4 |
| Conference Location: | Madison, WI |
| ISBN: | 0-7803-7480-0 |
| Publisher: | IEEE |
| Date Published: | 2002-01-01 |
| Start Page: | 337 |
| End Page: | 340 |
| Language: | English |
| ACCESSION: | WOS:000176123400070 |
| PROVIDER: | wos |
| DOI: | 10.1109/MMB.2002.1002342 |
| Notes: | Proceedings Paper -- 2nd Annual International IEEE/EMBS Conference on Microtechnologies in Medicine and Biology -- MAY 02-04, 2002 -- MADISON, WI -- IEEE/Engn Med & Biol Soc, Natl Inst Hlth, Defense Adv Res Project Agcy, Motorola, NimbleGen Syst Inc, PanVera Corp, Dow Chem Co, GWC Instruments, Venture Invest LLC, Univ Wisconsin-Madison, Dept Biomed Engn, IEEE/Robot & Automat Soc, Promega -- 345 E 47TH ST, NEW YORK, NY 10017 USA -- Source: Wos |
