MEMS-in-the-lens 3D beam scanner for in vivo microscopy Conference Paper
| Authors: | Dickensheets, D. L.; Liu, T.; Rajadhyaksha, M. |
| Title: | MEMS-in-the-lens 3D beam scanner for in vivo microscopy |
| Conference Title: | MOEMS and Miniaturized Systems XVIII |
| Abstract: | The "MEMS-in-the-lens" active lens for a laser scanning microscope comprises a high numerical aperture front element, a 3D+ MOEMS beam scanner and a collimating back lens. The scanner utilizes a silicon gimbal with SU-8 polymer flexures and deformable membrane mirror. The mirror aperture is 4 mm in diameter, and is capable of 9 μm deflection for focus control, with four annular electrodes to allow tuning of primary and secondary spherical aberration. The gimbal supports tip/tilt actuation up to ±3° for lateral beam scanning. We show confocal imaging using a benchtop mockup of the active lens, illustrating the potential for this approach to support 3D microscopy for optical biopsy applications. © 2019 SPIE. |
| Keywords: | mirrors; scanning; aberrations; lenses; active optics; mems scan mirror; moems 3d scanner; variable focus lens; variable focus mirror; moems; 3-d scanner; scan mirror; variable focus |
| Journal Title | Proceedings of SPIE |
| Volume: | 10931 |
| Conference Dates: | 2019 Feb 2-4 |
| Conference Location: | San Francisco, CA |
| ISBN: | 0277-786X |
| Publisher: | SPIE |
| Date Published: | 2019-01-01 |
| Start Page: | 1093110 |
| Language: | English |
| DOI: | 10.1117/12.2514579 |
| PROVIDER: | scopus |
| DOI/URL: | |
| Notes: | ISBN: 9781510625044 -- Source: Scopus |
